Parylene F, the newest commercially available variant of Parylene, replaces the alpha hydrogen atom of the N dimer with fluorine. This variant of Parylene is useful in high temperature applications (short term up to 450°C) and those in which long-term UV stability is required. Parylene F also has the lowest coefficient of friction and dielectric constant, and the highest penetrating ability of the four variants.
| Item | Parylene F | 
| Cas No. | 1785-64-4 | 
| Formula | C16H8F8 | 
| Weight | 352.2219 | 
| Appearance | White powder | 
| MP/BP | 321 ºC(BP) | 
| Purity | 99% Min | 
| Purpose | Optoelectronic Materials | 
| Storage | Room temperature |